| 摘要 |
PROBLEM TO BE SOLVED: To derive a protection layer which has superb anti-cavitation and anti-corrosion characteristics and makes high durability possible, with a discharging capability similar to a protection layer with Ta sheet. SOLUTION: A heating resistor forming a heating part 108, an insulated protection layer 106 prepared above the heating resistor, and an upper protection layer 107 which is patterned and formed by dry etching above the insulated protection layer and has a contact surface to be in contact with the ink, are included. The upper protection layer is formed of amorphous alloy consisting of Ta and Cr. More Ta contents are included than Cr contents. COPYRIGHT: (C)2004,JPO&NCIPI
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