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发明名称
Verfahren und Vorrichtung zur in-situ Endpunktbestimmung und zur Optimierung eines chemisch-mechanischen Polierverfahrens mit Linear Poliergerät
摘要
申请公布号
DE69816726(T2)
申请公布日期
2004.08.05
申请号
DE1998616726T
申请日期
1998.05.28
申请人
LAM RESEARCH CORP., FREMONT
发明人
JAIRATH, RAHAL;PECEN, JIRI;CHADDA, SAKET;KRUSSEL, WILBUR C.;CUTINI, JERAULD J.;ENGDAHL, ERIK H.
分类号
B24B21/04;B24B37/013;B24B49/04;B24D7/12;H01L21/304;H01L21/66;(IPC1-7):B24B37/04
主分类号
B24B21/04
代理机构
代理人
主权项
地址
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