| 摘要 |
The present invention relates to a hybrid type onium salt having an iodonium salt and a sulfonium salt in the molecule, useful, for example, as a cationic type photopolymerization initiator and an acid generator for a chemically amplified resist and provides a hybrid type onium salt shown by the general formula Ä1Ü: <CHEM> Äwherein R<1> to R<3> are each independently a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group or an amino group which may be substituted; Q1 is a direct-linkage, an oxygen atom, a sulfur atom or a lower alkylene chain; T1 is an alkylene group or an arylene group, which may have a substituent selected from the group consisting of a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amino group which may be substituted; and R<4> is an alkyl group, an alkenyl group, an aryl group or an aralkyl group, which may have a substituent selected from the group consisting of a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amino group which may be substituted or a group shown by the general formula Ä2Ü: <CHEM> (wherein R<5> to R<7> are each independently a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group or an amino group which may be substituted; Q2 is a direct-linkage, an oxygen atom, a sulfur atom or a lower alkylene chain; T2 an alkylene group or an arylene group, which may have a substituent selected from the group consisting of a halogen atom, an alkyl group, a haloalkyl group, an aryl group, an alkoxy group, an aryloxy group, an alkylthio group, an arylthio group and an amino group which may be substituted; A3 is a counter anion; m is an integer of 0 to 4; and two ns are each independently an integer of 0 to 5); A1 and A2 are each independently a counter anion; and m and n are the same as described aboveÜ, and a polymerization initiator or an acid generator, comprising said onium salt.
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