发明名称 Semiconductor device and method for manufacturing the same
摘要 In a provided semiconductor device, a plurality of seal rings (21-23) each made of a conductive material is formed along a periphery of the semiconductor chip (1) and as to surround the circuit formation portion (18), the seal ring (21-23) being connected with the semiconductor substrate and being buried in the plurality of wiring insulating films (8, 11, 13, 15, 16) in such a manner as to extend over the wiring insulating films (8, 11, 13, 15, 16), and one or more slit-like notches (21A-23A) are formed at specified positions in the plurality of seal rings (21-23) in such a manner that the respective slit-like notches (21A-23A) in two seal rings (21-23) being adjacent to each other are not aligned. <IMAGE> <IMAGE>
申请公布号 EP1443557(A2) 申请公布日期 2004.08.04
申请号 EP20030019375 申请日期 2003.08.27
申请人 NEC ELECTRONICS CORPORATION 发明人 Okada, Norio;Aizawa, Hirokazu;Minda, Hiroyasu
分类号 H01L23/52;H01L23/58;H01L21/3205;H01L21/60;H01L21/66;H01L23/00;H01L23/532 主分类号 H01L23/52
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