发明名称 MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
摘要 A micromechanical component and a method for producing the component are provided. The micromechanical component includes a substrate and a micromechanical functional layer of a first material provided over the substrate. The functional layer has a first and second regions, which are connected by a third region of a second material, and at least one of the regions is part of a movable structure, which is suspended over the substrate.
申请公布号 EP1441976(A2) 申请公布日期 2004.08.04
申请号 EP20020772043 申请日期 2002.09.05
申请人 ROBERT BOSCH GMBH 发明人 LAERMER, FRANZ
分类号 B81B3/00;B81C1/00;G01C19/5712;G01P15/00 主分类号 B81B3/00
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