发明名称 |
Detector-shield assembly for X-ray reflectometric system |
摘要 |
A detector assembly is introduced that provides shielding of irradiation vulnerable regions of an X-ray detector against directly impinging and scattered X-rays. A shielding unit has a primary aperture to shape an X-ray beam reflected from a test area of a work piece such that the shaped beam directly impinges an X-ray sensing area of the detector. A secondary aperture shields off X-rays scattering off along the edges of the primary aperture. In the preferred embodiment, the shielding unit is a monolithic structure. An area between primary and secondary aperture is laterally recessed to prevent a portion of scattered X-rays from being deflected onto the sensing area.
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申请公布号 |
US6770886(B1) |
申请公布日期 |
2004.08.03 |
申请号 |
US20010969561 |
申请日期 |
2001.10.02 |
申请人 |
THERMA-WAVE, INC. |
发明人 |
KOPPEL LOUIS N.;SCHMELZ CHARLES |
分类号 |
G01N23/20;H01L31/02;(IPC1-7):H01L31/02 |
主分类号 |
G01N23/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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