发明名称 Method of making multiple work function gates by implanting metals with metallic alloying additives
摘要 A method of forming a first and second transistors with differing work function gates by differing metals with a second metal selectively implanted or diffused into a first metal.
申请公布号 US6770521(B2) 申请公布日期 2004.08.03
申请号 US20020135725 申请日期 2002.04.29
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 VISOKAY MARK R.;ROTONDARO ANTONIO L. P.;COLOMBO LUIGI
分类号 H01L21/8238;(IPC1-7):H01L21/823 主分类号 H01L21/8238
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