发明名称 |
Co-deposited films with nano-columnar structures and formation process |
摘要 |
The invention concerns co-deposited films with nano-columnar structures. A film of the invention is formed upon a substrate, and includes a nano-columnar structure of a first material and a co-deposited second material.
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申请公布号 |
US6770353(B1) |
申请公布日期 |
2004.08.03 |
申请号 |
US20030341651 |
申请日期 |
2003.01.13 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
MARDILOVICH PETER;GOVYADINOV ALEXANDER;NEIMAN DAVID;HERMAN GREGORY S;CHAMPION DAVID;O'NEIL JAMES |
分类号 |
B32B3/00;H01J27/00;H01M8/00;H01M8/12;(IPC1-7):B32B3/00 |
主分类号 |
B32B3/00 |
代理机构 |
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地址 |
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