Electrical isolation of fluid-based switches

摘要

A channel plate is mated to a substrate to define at least a portion of a number of cavities. The channel plate is provided with a switching fluid channel, and a pair of ground channels adjacent the switching fluid channel. A switching fluid is held within a cavity defined by the switching fluid channel, and is movable between at least first and second switch states in response to forces that are applied to the switching fluid. In one embodiment, the ground channels are replaced with ground traces. The ground traces may be formed on or in the substrate or channel plate. Switching circuits incorporating one or more these switches are also disclosed.