发明名称 |
Semiconductor factory automation system and method for monitoring operational failure of stocker |
摘要 |
A method for monitoring an operational failure of a stocker for use in a semiconductor factory automation system, wherein the stocker is divided into a plurality of operational parts, includes the steps of: a) generating stocker state information representing an operational state of the stocker in response to a stocker state signal issued from the stocker; b) inspecting the stocker state information to update the operational state of the stocker previously stored; c) generating a warning signal when at least one part contained in the stocker has failed; and d) generating an audiovisual warning sign in response to the warning signal. The method can effectively provide audiovisual warning signs when the stocker has failed.
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申请公布号 |
US6772046(B1) |
申请公布日期 |
2004.08.03 |
申请号 |
US20000604304 |
申请日期 |
2000.06.26 |
申请人 |
HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. |
发明人 |
LEE CHANG-JUN;SEO KYOUNG-JIN |
分类号 |
B65G1/00;B65G1/137;G05B19/418;H01L21/00;H01L21/02;H01L21/677;(IPC1-7):G06F17/00 |
主分类号 |
B65G1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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