发明名称 |
Methods and structure for improving wafer bow control |
摘要 |
A method for controlling bow in wafers which utilize doped layers is described. The method includes depositing a silicon-germanium layer onto a substrate, depositing an undoped buffer layer onto the silicon-germanium layer, and depositing a silicon-baron layer onto the undoped layer.
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申请公布号 |
US6770504(B2) |
申请公布日期 |
2004.08.03 |
申请号 |
US20030337011 |
申请日期 |
2003.01.06 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
HORNING ROBERT D.;ROBINSON MCDONALD;SCULLARD TIMOTHY LOUIS |
分类号 |
B81B3/00;B81C1/00;(IPC1-7):H01L21/00;H01L21/31;H01L21/469 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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