CANISTER FOR SEMICONDUCTOR FABRICATING PROCESS

摘要

PURPOSE: A canister for a semiconductor fabricating process is provided to solve a problem that a gas exhaust pipe line is reduced in diameter or stopped by a scale formed in the gas exhaust pipe line by improving purification of reaction gas exhausted from a sealing receptacle through the gas exhaust pipe line. CONSTITUTION: Induced reaction gas is purified in a sealing receptacle having a purifying unit(260) in its inside. An end of a gas input pipe line(240) is inserted into the inside of the sealing receptacle, and the gas input pipe line induces the reaction gas. An end of a gas exhaust pipe line exhausts the reaction gas from the sealing receptacle, and the gas exhaust pipe line exhausts the reaction gas from the sealing receptacle. A filter(280) is installed in a connection part of the gas exhaust pipe line and the sealing receptacle.