APPARATUS FOR MAPPING SEMICONDUCTOR WAFER

摘要

PURPOSE: An apparatus for mapping a semiconductor wafer is provided to shorten an interval of mapping time and improve productivity by simultaneously sensing whether wafers are received in a slot of a cassette, and prevent a semiconductor wafer mistakenly received in the slot of the cassette from colliding with a transfer robot by detecting a slot mistake of the wafer. CONSTITUTION: A semiconductor wafer mapping apparatus(130) maps the wafers tacked in the slots of a cassette. The first and second detecting sensors detect one wafer in different positions. The first and second detecting sensors are disposed as many as the number of the slots of the cassette.