WAFER TRANSFER APPARATUS WITH SENSING CAPACITY OF WAFER SLIDING

摘要

PURPOSE: A wafer transfer apparatus with sensing capacity of wafer sliding is provided to prevent a wafer from being damaged by installing a detection unit in a wafer transfer apparatus and by stopping the wafer transfer apparatus when the wafer slides. CONSTITUTION: A guide block(51) transfers horizontally and vertically and rotates. A transfer body(52) simultaneously performs a vertical transfer and a rotational transfer, mounted on the guide block. A plurality of tweezers(53) hold the wafer(W), installed in a side of the transfer body. A detection unit(54) detects the sliding of the wafer, installed in a side of the guide block.