| 摘要 |
PURPOSE: A substrate processing device for an LCD device is provided to integrate a fluid supply piping with a fixing means, and not to dispose the fluid supply piping outside an outer wall of the substrate processing device, thereby simplifying a configuration and removing a possibility of a fluid leak. CONSTITUTION: A substrate transfer device(210) is comprised. A fluid injection device(220) is fixed to the substrate transfer device(210), and injects a fluid to a transferred substrate. A fixing means(230) fixes the fluid injection device(220) to the substrate transfer device(210). A fluid supply piping(240) is connected to the fluid injection device(220), and supplies the fluid to the fluid injection device(220). The fluid supply piping(240) comprises as follows. An inlet(241) connects with the fluid injection device(220). A fluid supply hole(242) is connected with the inlet(241).
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