METHOD FOR FABRICATING TIP OF ELECTRIC CONTACTOR FOR INSPECTING ELECTRONIC ELEMENT

摘要

PURPOSE: A method for fabricating a tip of an electric contactor for inspecting an electronic element is provided to form a tip having a sharp end by performing a MEMS(Micro Electro Mechanical System) process. CONSTITUTION: A protective layer pattern is formed on a sacrificial silicon substrate in order to a tip forming region. The first anisotropic etch process is performed by using the protective layer pattern as an etch mask. A trench is formed on the sacrificial silicon substrate. The protective layer pattern is removed from a peripheral part of the trench. The width of the upper part of the trench is increased and the upper end of the trench is sharpened by performing the anisotropic etch process for the trench. The trench is buried by a conductive material. A tip(24) is formed by removing the protective layer pattern and the sacrificial silicon substrate.