发明名称 METHOD FOR FABRICATING INK JET PRINT HEAD
摘要 PURPOSE: A method for fabricating an ink jet print head is provided to prevent a fluid path plate and a nozzle plate from being thermally deformed or damaged when forming a mask. CONSTITUTION: A heater and an insulation layer for protecting the heater are formed on an upper surface of a substrate. A fluid path plate forming an ink chamber and a fluid path is formed on the substrate corresponding to the heater. Then, an orifice is formed on the fluid path plate corresponding to the ink chamber. Photoresist is coated on a lower surface of the substrate, thereby forming a mask(11). The mask is subject to a pre-baking process in such a manner that the mask is primarily dried(12). Then, solvent included in the mask is removed by applying vacuum pressure to the mask.
申请公布号 KR20040067121(A) 申请公布日期 2004.07.30
申请号 KR20030004102 申请日期 2003.01.21
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, YUN GI;PARK, SEONG JUN;PARK, YONG SIK
分类号 B41J2/235;(IPC1-7):B41J2/235 主分类号 B41J2/235
代理机构 代理人
主权项
地址