METHOD FOR FABRICATING SOI DEVICES WITH OPTION OF INCORPORATING AIR-GAP FEATURE FOR BETTER INSULATION AND PERFORMANCE,申请号SG20020001431-传众专利搜索

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发明名称	METHOD FOR FABRICATING SOI DEVICES WITH OPTION OF INCORPORATING AIR-GAP FEATURE FOR BETTER INSULATION AND PERFORMANCE
摘要
申请公布号	SG104962(A1)	申请公布日期	2004.07.30
申请号	SG20020001431	申请日期	2002.03.13
申请人	CHARTERED SEMICONDUCTOR MANUFACTURING, LTD	发明人	YEOW KHENG LIM;RANDALL CHA CHER LIANG;ALEX SEE;TAE JONG, LEE;GOH WANG LING
分类号	H01L21/762;H01L21/764;H01L27/12;(IPC1-7):H01L	主分类号	H01L21/762
代理机构		代理人
主权项
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