| 摘要 |
PROBLEM TO BE SOLVED: To provide a drying device for promptly drying a component or the like after cleaning it with cleaning liquid without having the cleaning liquid left in a place hard to be dried such as a clearance gap even when cleaning with the cleaning liquid hard to be dried such as water. SOLUTION: The drying device 1 used is provided with a treating tank 10, a suction device 11, a vacuum pressure reducer 12, and an influent outside air heating device 13. An object to be treated is put in the treating tank 10. In a first drying process, outside air is introduced to the treating tank 10 while being heated, through the suction device 11 and the influent outside air heating device 13 and depressurized for drying. In a second drying process, the air is further depressurized by using the vacuum pressure reducer 12 for drying. COPYRIGHT: (C)2004,JPO&NCIPI
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