| 摘要 |
PROBLEM TO BE SOLVED: To reduce DC resistance of a spiral inductor and improve Q value. SOLUTION: Along a wiring 16 formed in a spiral type, a wiring 18 is formed in a wiring layer different from the wiring layer to which the wiring 16 belongs. In the outermost periphery of a spiral of the wiring 16, the wiring 18 is formed along the outside edge of the wiring 16. In the innermost periphery, the wiring 18 is formed along the inside edge of the wiring 16. Consequently, increase of capacitance between wirings and counterpart substrate capacitance can be restrained, so that application to higher frequency is enabled. COPYRIGHT: (C)2004,JPO&NCIPI
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