| 摘要 |
PROBLEM TO BE SOLVED: To provide character reading method/device by which ID on the surface of a wafer different in a surface state can be read without a problem, the operation efficiency of a device (especially, operation efficiency of an automated device) in a crystal inspection system becomes sufficient, a load of an operator is dissolved and an artificial error such as an input error can be avoided, and to provide a crystal inspection method for inspecting the crystal quality of the wafer by using the method and the device. SOLUTION: In the character reading method, an identification mark printed on the surface of the wafer is image-picked up and an identification code is recognized based on an image signal which is image-picked up. Two or more pieces of switchable code recognition level information are set by giving priority. When the identification code cannot be recognized by the code recognition level information in high priority, code recognition level information is automatically and sequentially switched to code recognition level information of low priority in accordance with priority, and the recognition work of the identification code is performed. COPYRIGHT: (C)2004,JPO&NCIPI
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