| 摘要 |
PROBLEM TO BE SOLVED: To provide a deposition apparatus capable of reducing the effect of radiation heat from a crucible which is the source of evaporation to a deposition mask, to suppress swelling of the deposition mask for deposition of high precision. SOLUTION: The deposition apparatus 1 coats the deposition material 71 evaporated through a deposition mask 31 on a substrate 51. It comprises the crucible 12 in which the deposition material 71 is stored for evaporation, a protrusion part 13 formed to protrude from the upper part of the crucible 12 that faces the substrate 51 to be coated, a hole 14 formed at the protrusion part 13 toward the substrate 51 to be coated from inside the crucible 12, and a radiation blocking body 15 provided, around the protrusion part 13, at such level as equal to an injection-side opening part 14a of the hole 14 or as lower than the injection-side opening part 14a of the hole 14, with a space d from the upper surface of the crucible 12 on the side of the substrate 51 to be coated. COPYRIGHT: (C)2004,JPO&NCIPI
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