| 摘要 |
PROBLEM TO BE SOLVED: To facilitate the position determination of an inspection object part for filter inspection. SOLUTION: This scanner for filter inspection is equipped with an information input means for determining the position of the rectangular inspection object part 11 of an installed filter 4 and a control means 12 for determining the position of the object part 11 based on input information to cause a scanning inspection tool 13 to perform scanning motion with respect to the object part 11. The scanner is provided, as input means, with a trace input means x1 for performing inputting with the inspection tool sequentially positioned by human power operation so as to correspond to two apexes 11a and 11c of opposite angles of a rectangle and an auxiliary input means y1 for inputting shape information used for determining the size and shape of the rectangle by human power operation of a prescribed scanning form dispensing with moving operation of the inspection tool. The control means 12 of the scanner is structured so as to determine the position of the object part 11 based on positional information on the two apexes 11a and 11c of the opposite angles inputted by the input means x1, order in which the positional information on the two apexes 11a and 11c is inputted, and the shape information inputted by the input means y1. COPYRIGHT: (C)2004,JPO&NCIPI
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