| 摘要 |
PROBLEM TO BE SOLVED: To enable a substrate to be directly set in a processing device without transferring the substrate (especially, a TFT substrate) by using a carrying container, and to allow one container to carry substrates of different sizes by efficiently using the container. SOLUTION: In the manufacturing system, a substrate supplier 18 directly stores the substrate 11 in a carrying container 12 subjected to electrostatic countermeasure, and a substrate customer 19 directly sets the container 12 in the processing device after carrying. Therefore, the substrate 11 including the TFT substrate 11 can be carried, and transferring work can be eliminated, so that particle pollution to the substrate 11 or electrostatic discharge damage of the TFT substrate 11 can be prevented, A substrate holding portion of the container 12 is changed according to the size of the substrate 11 to be carried, and the substrates 11 having different size can be carried by one container 12. COPYRIGHT: (C)2004,JPO&NCIPI |
