INORGANIC NANOPOROUS MEMBRANE AND ITS FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a nanoporous membrane structure used as a sacrifice membrane for defining the size and density of a hole in a membrane. SOLUTION: This method forms an inorganic membrane material 600 on a silicon substrate 604, forms a porous self-assembled material 606 on the inorganic membrane material 600, and forms the inorganic porous membrane which patterns the inorganic membrane material 600 by using the porous self-assembled material 606 as a mask. COPYRIGHT: (C)2004,JPO&NCIPI