Method for the manufacture and transmissive irradiation of a sample, and particle-optical system

摘要

The invention provides a method for the manufacture and transmissive irradiation of a sample, comprising the steps of: A Providing a particle-optical system having an internal low-pressure chamber and suitable for the generation of an electron beam and an intersecting ion beam in said chamber; B Providing a specimen within the chamber, carried by a manipulator; C Irradiating the specimen with the ion beam so as to cut a sample from the specimen; D Relatively displacing the sample thus cut to a sample holder than can be manipulated; E Attaching the sample to the sample holder; F Using an electron beam to perform transmissive irradiation of the sample thus attached to the sample holder, characterized in that step F is performed in the low-pressure chamber of the particle-optical system according to step A.