| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a novel acid generator which is excellent in transparency to a radiation, generates an acid upon irradiation or heating, is nonproblematic in flammability and accumulation in the human body, and generates an acid having a high acidity and a high boiling point, being suitably short in a diffusion distance in a resist film, and having a small pattern dependency; and to provide, e.g., a radiation-sensitive resin composition containing the acid generator. <P>SOLUTION: The acid generator has a structure represented by formula (1) or formula (2) (wherein R<SP>1</SP>is a hydrogen atom or a monovalent substituent; p is an integer of 1 or greater; Z<SP>1</SP>and Z<SP>2</SP>are each a fluorine atom or a perfluoroalkyl group; Y<SP>1</SP>is a single bond or a divalent group; R<SP>2</SP>is a monovalent or divalent substituent; q is an integer of 0 or greater; and n is an integer of 0 to 5). The radiation-sensitive resin composition contains the acid generator and an acid-dissociable-group-containing resin when it is a positive one; it contains the acid generator and an alkali-soluble resin and a crosslinking agent when it is a negative one. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
