Plasma treatment container internal member, and plasma treatment device having the plasma treatment container internal member

摘要

A plasma treatment container internal member disposed in a plasma treatment container for micromachining a treated matter by a plasma etching treatment, wherein, as a pre-treatment, an oxidized film (111) is formed on the surface of the base material (101) of the treatment container internal member by an anode oxidation using plasma discharge, and a thermally sprayed film (121) is formed on the oxidized film (111).