发明名称 Laser alignment structure for integrated circuits
摘要 Laser alignment structures are formed over an integrated circuit by forming structures of a first width (90) adjacent to structures of a second width (100) where the second width is greater than five times the first width. In addition the structures of a first width are separated from each other by a distance that between one and five times the first width.
申请公布号 US2004145066(A1) 申请公布日期 2004.07.29
申请号 US20030351112 申请日期 2003.01.24
申请人 SWANSON LELAND S.;HOWARD GREGORY E. 发明人 SWANSON LELAND S.;HOWARD GREGORY E.
分类号 H01L23/544;(IPC1-7):H01L21/76 主分类号 H01L23/544
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