发明名称 |
Laser alignment structure for integrated circuits |
摘要 |
Laser alignment structures are formed over an integrated circuit by forming structures of a first width (90) adjacent to structures of a second width (100) where the second width is greater than five times the first width. In addition the structures of a first width are separated from each other by a distance that between one and five times the first width.
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申请公布号 |
US2004145066(A1) |
申请公布日期 |
2004.07.29 |
申请号 |
US20030351112 |
申请日期 |
2003.01.24 |
申请人 |
SWANSON LELAND S.;HOWARD GREGORY E. |
发明人 |
SWANSON LELAND S.;HOWARD GREGORY E. |
分类号 |
H01L23/544;(IPC1-7):H01L21/76 |
主分类号 |
H01L23/544 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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