| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element of good characteristics by reducing disturbance of a piezoelectric thin film in the direction of crystal growth. <P>SOLUTION: A piezoelectric element 16 comprises a first electrode 7, a piezoelectric thin film 8 formed on the first electrode, a second electrode 9 formed on the piezoelectric thin film, and a vibration plate 11. An electrode layer 2 formed on the surface of a first substrate 1 comprising a smooth substrate surface is transferred to a second substrate 5 to form a first electrode 7. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
