| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater provided with a resistance heater while having good temperature control and excellent durability such as oxidation resistance or the like, by using a ceramic substrate as a base material of the heater. SOLUTION: The resistance heater comprising one, two or more circuits is disposed on the ceramic substrate of the ceramic heater, and an insulating coating is provided on the resistance heater. COPYRIGHT: (C)2004,JPO&NCIPI
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