| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin and light heater easy to control the temperature. SOLUTION: The heater has heating elements formed by sintering metal grains on the surface of a plate-shaped body made of nitride ceramic or carbide ceramic, and the plate-shaped body has a recess for a thermocouple. The nitride ceramic or the carbide ceramic has a coefficient of thermal expansion smaller than that of metal, and not warped nor distorted even if the thickness is reduced, by the above, the heater plate can be made thin and light. Since the heater plate is thin and the heat conductivity of the heater plate is high, the temperature at the surface of the heater plate quickly follows the change in the temperature of the heating element. COPYRIGHT: (C)2004,JPO&NCIPI
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