发明名称 DEPOSITION MASK, DEPOSITION METHOD, MANUFACTURING METHOD OF ORGANIC EL PANEL, AND ORGANIC EL DISPLAY PANEL
摘要 PROBLEM TO BE SOLVED: To provide a deposition mask having good workability without damaging a deposition film or other constituent members in attaching and detaching the deposition mask, when the deposition mask is installed on a board in a form adjoining the board while keeping a certain distance in mask deposition. SOLUTION: This deposition mask 1 has openings 1a formed according to a deposition pattern, and is provided with projection parts 1b formed by pressingly deforming a base plate 11 of the deposition mask 1 itself toward the side where the base plate 11 is installed. Thereby, the deposition mask 1 is installed adjacently to the base plate 11 while keeping a certain distance to it. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004214015(A) 申请公布日期 2004.07.29
申请号 JP20020381922 申请日期 2002.12.27
申请人 TOHOKU PIONEER CORP 发明人 TAN HIROKI;ABIKO HIROSHI
分类号 H05B33/10;C23C14/04;H01L51/50;H05B33/14;(IPC1-7):H05B33/10 主分类号 H05B33/10
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