| 摘要 |
PROBLEM TO BE SOLVED: To tune gaps among a plurality of surfaces of at least one micromechanical elements on a disc. SOLUTION: The contour of at least one micromechanical element in an upper layer of a device is etched, and the contour defines at least two facing surfaces of a plurality of surfaces of at least one micromechanical elements. A gap narrowing layer is deposited on at least two facing surfaces of the plurality of surfaces in an epitaxial reactor, so that the gap between at least the two facing surfaces of the plurality of surfaces is narrowed by the gap narrowing layer. COPYRIGHT: (C)2004,JPO&NCIPI
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