ETCHING COMPONENT EMPLOYING HOT-MELT RESIST AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an etching component produced by wet etching after forming an etching resist pattern on a metal material, which prevents progress of side etch, that is, to provide an etching component of high aspect ratio and to provide a method for manufacturing the component. SOLUTION: The method comprises the steps of forming a pattern of hot-melt resist 112, carrying out first etching, heating the pattern for softening and flowing, covering etched sides with the pattern, and carrying out second etching in which progress of etching in side faces is permitted to be slower than the progress in depthwise direction. Surface tension of the hot-melt resist 112 should fall within the range of 68×10-3to 78×10-3N/m. COPYRIGHT: (C)2004,JPO&NCIPI