| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing system easy in handling, a substrate processing device, and the managing method of the substrate processing system by managing the substrate processing device, so as to be easily understood by a user when the arranging conditions of the substrate processing units are different in respective substrate processing devices. SOLUTION: When the substrate processing system is equipped with a plurality of substrate processing devices 100, 200, in which a plurality of spaces capable of installing the substrate processing unit are provided, and the spatial layouts of a plurality of spaces are same but the actual arranging conditions of the substrate processing units in the plurality of spaces are different; the plurality of substrate processing devices 100, 200 are managed based on a layout number, allotted to the plurality of spaces with a common rule with respect to the plurality of substrate processing devices 100, 200 to discriminate the plurality of spaces mutually. COPYRIGHT: (C)2004,JPO&NCIPI
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