| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and an inspection device capable of easily and accurately inspecting the arrangement state of spacers. SOLUTION: In inspecting the arrangement state of the plurality of spacers arranged on a setting face, an inspection light is radiated tward the spacers 30a by a light source in a direction slanted by 0 to 20 degrees against the setting face, and scattered light scattered by the spacers is imaged by an imaging device 54 fitted against the setting face to inspect the arrangement state of the spacer by an image obtained. COPYRIGHT: (C)2004,JPO&NCIPI
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