| 发明名称 |
METHODS AND STRUCTURE FOR IMPROVING WAFER BOW CONTROL |
| 摘要 |
A method for controlling bow in wafers (50) which utilize doped layers is described. The method includes depositing a silicon-germanium layer (52) ont o a substrate (14), depositing an undoped buffer layer (56) onto the silicon- germanium layer, and depositing a silicon-boron layer (58) onto the undoped layer. |
| 申请公布号 |
CA2512699(A1) |
申请公布日期 |
2004.07.29 |
| 申请号 |
CA20042512699 |
申请日期 |
2004.01.05 |
| 申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
SCULLARD, TIMOTHY LOUIS;HORNING, ROBERT D.;MCDONALD, ROBINSON |
| 分类号 |
B81B3/00;B81C1/00;(IPC1-7):B81B3/00 |
主分类号 |
B81B3/00 |
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