| 摘要 |
PROBLEM TO BE SOLVED: To utilize the soft X-ray of narrow band of wavelength 4-6 nm, for example, at high brightness and in a large light quantity. SOLUTION: The X-ray optical system is provided with a filter 52 which comprises a polymer film in which a metal film of at least either one of tin and lead is laminated and allows the soft X-ray of a prescribed wavelength in narrow band to pass. The polymer film contains much carbon atoms, so it acts as a carbon film to allow the soft X-ray of wavelength 5-15 nm to pass well. A thin film of at least one of tin and lead is easily formed on the surface of polymer film. The metal film allows only such soft X-ray as of further narrower wavelength to pass. COPYRIGHT: (C)2004,JPO&NCIPI |
