| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-cost probe card, not only usable in high speed test, but also applicable to allay-like electrode disposition of inspected devices, thus enhancing its versatility, since contact probes themselves are small and lengths along which signals are transmitted can be on the order of 1 mm. SOLUTION: Pattern wiring 33 is formed on a surface of a base substrate 30. The plurality of contact probes 31 made of conductive material are fixed to the substrate 30. A base part 31b of each contact probe 31 is adhesively fixed by its joint surface 31a onto the substrate 30. An inspected device side contact 31c makes elastic contact with an electrode 51 of the inspected device 50. A substrate side contact part 31d makes contact with the pattern wiring 33. COPYRIGHT: (C)2004,JPO&NCIPI
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