Air feed system, air dezymotizing method, and system and method for transfer

摘要

An air feed system (1), comprising a filter (6) for removing dust in the air installed in an air feed pipe (4) for connecting an air feed part (2) to an object district (C) and a sterilizing part (10) having an electron beam irradiation unit (11) installed between the air feed part (2) and the filter (6); an air dezymotizing method, comprising the steps of removing dust in the air by the filter (6) in the air feed pipe (4) for connecting the air feed part (2) to the object district (C) and irradiating electron beam to the air circulating through the inside the air feed pipe (4) between the air feed part (2) and the filter (6).