| 摘要 |
A functional surface, such as a reflective surface, is supported by a pair of torsional hinges for pivoting about a first axis which in turn is supported by a pair of anchors, according to one embodiment. The reflective surface may be driven into resonant oscillations about the first axis by inertially coupling energy to the device. According to a dual axis embodiment, the reflective surface is attached by torsional hinges to a gimbals portion which in turn is attached to the support members by a second pair of torsional hinges which are orthogonal with the first pair of hinges so as to provide for pivoting of the surface about both pairs of torsional hinges. Thus, a light source may be reflected from a reflective surface to produce a beam sweep and moved orthogonally by the gimbals portion. The devices may be etched from silicon. |
