| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin-film solar battery and the manufacturing method thereof wherein its rear-surface transparent electrode layer having a high throughput and a stabilized film quality and capable of obtaining a good ohmic junction is so formed as to be able to improve its output characteristic and further improve its photoelectric converting efficiency even when its area is large. <P>SOLUTION: In the thin-film solar battery, a transparent electrode layer, a semiconductor photoelectric conversion layer, a rear-surface transparent electrode layer, and a rear-surface reflecting metal layer are laminated successively. Further, the rear-surface transparent electrode layer has a two-layer structure comprising an ITO layer and a ZnO:Al layer formed in this order on the semiconductor photoelectric conversion layer. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
