| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a nano-structure using a transfer technique, with which a high quality nano-structure can be manufactured at a high yield and at a low cost, with a controlled accuracy. <P>SOLUTION: The method for manufacturing a nano-structure comprises (1) a step for fixing a loading table, on which a workpiece is supplied relative to a mother mold, to a predetermined position, (2) a step for pressing the mother mold to the workpiece or pressing the workpiece to the mother mold, by avoiding the contact between the bottom part of a pattern and the surface of the workpiece, so as to deform the workpiece along the pattern, (3) a step for releasing the mother mold from the workpiece, (4) a step for moving the mother mold or the loading table, so as to alter the relative position between the mother mold and the loading table, and (5) a step for repeating the steps (2) to (4) for predetermined times after conducting the step (4). The hardness of the pattern is higher than that of the workpiece. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
