METHOD AND APPARATUS FOR MEASURING VIBRATION FREQUENCY OF MULTI-CANTILEVER

摘要

PROBLEM TO BE SOLVED: To provide a method of measuring the vibration frequency of a multi-cantilever which dispenses with the incorporation of an excitation or detection element in an individual cantilever by performing optical excitation and optical measurement, simplifies the structure of a cantilever array and can obtain a high Q-value or a variety of high frequency operation and modification method of the cantilever, and to provide an apparatus therefor.

SOLUTION: The cantilever array 11 wherein the characteristic frequencies of cantilevers 2-n are different from each other is used and the natural vibrations of the cantilevers are successively excited by the excitation of modulated light to be measured with a laser Doppler meter.

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