发明名称 DROP DISCHARGE SYSTEM, DISCHARGE AMOUNT MEASURING AND DISCHARGE AMOUNT ADJUSTING METHODS FOR DROP DISCHARGE HEAD, ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD FOR THE DEVICE, AND ELECTRONIC EQUIPMENT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a drop discharge system accurately adjusting drop discharge amount of a drop discharge head, a discharge amount measuring method and a discharge amount adjusting method for the head, an electro-optical device manufactured by using the system, a manufacturing method therefor, and electronic equipment equipped with the electro-optical device. <P>SOLUTION: The drop discharge system 10 has a drop discharge device 1 and a chamber 91 containing it. The device 1 is provided with a head unit 11 having a plurality of the drop discharge heads discharging drops to a substrate as a work, and a discharge amount measuring unit 84 having a liquid receiver for discharge amount measuring by receiving drops discharged from the head for measuring the drop discharge amount of the head. Temperature and humidity inside the chamber 91 are controlled as environmental conditions. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p>
申请公布号 JP2004209429(A) 申请公布日期 2004.07.29
申请号 JP20030001607 申请日期 2003.01.07
申请人 SEIKO EPSON CORP 发明人 KOBAYASHI YUKI
分类号 G02B5/20;B05C5/00;B05C11/00;B05C11/10;B05D1/26;B05D3/00;G02F1/13;H01L51/50;H05B33/10;H05B33/14;(IPC1-7):B05C11/10 主分类号 G02B5/20
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