ALIGNMENT DRIVING MECHANISM AND POSITIONING DEVICE PROVIDED WITH THE MECHANISM

摘要

PROBLEM TO BE SOLVED: To guide an output member such as a clamp rod at high accuracy. SOLUTION: The alignment driving mechanism is constituted by providing a housing 6 on a reference block 1. An annular plug 9 is inserted to a positioning hole 3 of a work pallet 2 and is upwardly projected from the housing 6. The output member 13 is vertically movably inserted to a guide hole 10 of the housing 6. An upper end of the output member 13 is inserted to the annular plug 9 and a plurality of pressing unit 56 are radially movably supported on a peripheral wall 9a of the annular plug 9. An annular alignment space 31 is formed between a part 21 to be guided of the output member 13 and the guide hole 10. A shuttle member 41 enlarged and contracted to a radial direction is inserted to the alignment space 31 and is upwardly urged by a spring 51. COPYRIGHT: (C)2004,JPO&NCIPI