DEFECT DETECTOR AND DEFECT DETECTING METHOD

摘要

A defect detector comprising a scan stage on which a substrate to be inspected is placed and which is movable in a predetermined direction, an illumination optical system for projecting an illumination light beam onto the surface of the substrate at a predetermined angle of inclination, a detection optical system composed of an up optical sensor for receiving scattered light reflected and scattered upward from the substrate and generating an up image signal and a side optical sensor for receiving scattered light reflected from the substrate and traveling in an inclined direction crossing the illumination light beam in a plane and generating a side image signal, and a signal processing system for detecting a defect, if any, according to the up and side image signals.