Precision microscope, e.g. for industrial measurement applications, has a detector-side correction lens (6) for correction of optical defects in an objective

摘要

Microscope precision optical measurement arrangement comprises an objective assembly (1) with at least a microscope objective (2) together with a detection unit (4) for recording the microscope image. At a short distance from the detector surface (4.1) is a correction lens (6) for correction of image errors over a first image field area that arise from optical imperfections in the objective lens. An Independent claim is made for a method of manufacture of an optical measurement arrangement for precise measurement applications.