摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electronic device which is small and compact in size, free from deterioration of element characteristics caused by heating treatment, perfect in hermetical sealing, and has an MEMS element and other functional elements mounted thereon. <P>SOLUTION: According to the structure of the electronic device, an element carrying space 8 is defined by a device main body 1 and a lid 2, and hermetically sealed by an ultrasonic bonded part 3. Then a fine mechanical component part 4 which is secured to the device main body 1 and/or the lid 2, is arranged in the element carrying space 8. <P>COPYRIGHT: (C)2004,JPO&NCIPI |